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Digest of papers Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan by International Microporcesses and Nanotechnology Conference (20th 2007 Kyoto, Japan)

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Published by Japan Society of Applied Physics in Tokyo .
Written in English


  • Nanotechnology -- Congresses,
  • Microelectronics -- Congresses,
  • Microlithography -- Congresses

Book details:

Edition Notes

Includes bibliographical references and index.

Statementsponsored by the Japan Society of Applied Physics ; technical-cosponsored by IEEE Electron Device Society ; in cooperation with Association of Super-Advanced Electronics Technologies ... [et al.].
LC ClassificationsTK7875 .I585 2007
The Physical Object
Paginationxxxii, 543 p. :
Number of Pages543
ID Numbers
Open LibraryOL23629817M
ISBN 104990247248
LC Control Number2008274639

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